摘要 本文分析了低溫固結(jié)磨料拋光硅片的傳熱模型，并借助有限元軟件ANSYS對(duì)熱傳導(dǎo)過程進(jìn)行了仿真，獲得了冰凍磨具在不同拋光時(shí)刻的溫度場等溫圖及工作區(qū)域的融化厚度值。并且在相同工藝參數(shù)下，進(jìn)行拋光實(shí)驗(yàn)，驗(yàn)證了有限元數(shù)值分析結(jié)果。分析仿真結(jié)果表明：環(huán)境溫度為20oC情況下，磨削熱并非是導(dǎo)致冰凍磨具融化的主要原因，周圍空氣對(duì)流換熱對(duì)溫度場的影響較大，磨具溫升速度為先快后慢，拋光區(qū)域的融化速度比較穩(wěn)定。采用此有限元模型，可以分析拋光時(shí)間、環(huán)境溫度等參數(shù)對(duì)溫度場的影響，為低溫固結(jié)磨料拋光硅片的溫度場研究提供理論指導(dǎo)。(金剛石與磨料磨具工程2009年第一期)
　　
　　Abstract Heat transfer model was analyzed for polishing with ice fixed abrasives in this paper．With ANSYS finite element，the value of temperature fields for polishing was simulated．The temperature contour map of temperature field and the melting thickness values of working area of ice fixed abrasive tool were obtained．Polishing experiments were conducted with the same technological parameters．Compared with polishing experiments，the simulation result of FEM model was proved to be right．According to the simulation result of FEM，we can get the main reason of melting of working area in ice fixed abrasive tool which is not grinding heat but air convection surrounding the tool at 20oC ambient．The temperature increment followed a rule of 6rSt fast then slow． Melting velocity curve of working area of ice fixed abrasive tool was steady and change little．Other technical parameters( for example ambient temperature or polishing time) can be analyzed in advance by the FEM model，and provide theoretical guidance for research of temperature field of polishing with ice fixed abrasives