摘要 在具有新型諧振腔的微波等離子體CVD裝置上，利用乙醇和氫氣為工作氣體在石英玻璃管外表面沉積了均勻、致密的納米金剛石薄膜。采用掃描電子顯微鏡、Raman光譜及X射線(xiàn)衍射表征了金剛石薄膜的質(zhì)量；設(shè)計(jì)腐蝕實(shí)驗(yàn)檢驗(yàn)了金剛石薄膜的抗腐蝕效果。結(jié)果表明：在反應(yīng)氣壓為5．5 kPa、碳源濃度為8 vo1％、石英玻璃管溫度為500oC的條件下，得到的納米金剛石薄膜能有效增強(qiáng)石英玻璃管的抗腐蝕性能。（金剛石與磨料磨具工程2009年第一期）
　　
　　Abstract Uniform and compact nanocrystalline diamond thin films were deposited on quartz tube substrate with the gas mixture of ethanol and hydrogen by microwave plasma CVD equipment which has a novel type of resonance cavity．The quality of diamond thin films were tested by SEM，Raman spectroscopy and XRD．A corrosion experiment was designed to test the anti—corrosion effect of diamond thin films．The results showed that when the reaction pressure is 5.5 kPa，the ethanol concentration is 8 vo l％，the reaction temperature is 500 oC，the nanocrystalline diamond thin film could be obtained，which is able to enhance the anti—corrosion
performance of quartz tube．